• High purity sulfuric acid(PSA: Pure Sulfuric Acid)
    High purity sulfuric acid(PSA: Pure Sulfuric Acid)

    High purity sulfuric acid (PSA), also referred to as “electronic-grade sulfuric acid,” which is used for semiconductors, is an essential material for semiconductor manufacturing as it removes even the finest impurities on the surface of wafers in the cleaning → wet-cleaning process during semiconductor manufacturing.

    LS MnM manufactures PSA by evaporating high-quality liquid anhydrous sulfuric acid (L-SO3) produced from sulfurous acid gas (SO2) generated in the smelting process and absorbing it into ultrapure water (UPW). Its quality and stability are guaranteed as it is automatically filled into tank lorries after several stages of nano-filtration. We take great pride in our quality assurance system, which incorporates our cutting-edge analysis equipment and unparalleled expertise. Our advanced processes allow us to produce the highest quality PSA, which we supply to renowned semiconductor companies in Korea.

    반도체용 고순도 황산 이미지 반도체용 고순도 황산 이미지
    • Production capacity

      180 kt/y

    • Uses

      Cleaning impurities on the surface of wafers during the semiconductor manufacturing process

    • Specifications

      Properties Unit Specifications
      H2SO4 % 96.0±0.5
      Impurities Ga, Au, Si, As, Ti ppb < 0.1
      B ppb < 0.05
      Li, Be, Na, Mg, Al, K, Ca, Cr, Mn, Fe, Co, Ni, Cu, Zn, Ge, Sr, Ag, Cd, Sn, Ba, Pb, Hg, Sb, Bi, Mo, Nb, Se, Ta, Tl, V, Zr, W ppb < 0.02
    • Shipping type

      tank lorries